Handbook of Sputter Deposition Technology: Principles,...

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Handbook of Sputter Deposition...

Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

Name: Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)
ISBN: 9780815517733

Kiyotaka Wasa, Shigeru Haber

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A concise, comprehensive overview of sputter deposition technology?a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Kategori:

Engineering

Tahun:

1993

Bahasa:

english

Halaman:

316

ISBN 10:

0815517734

ISBN 13:

9780815517733